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                ArisMD主动减震台/主动隔】振台

                电子显微镜主动▓减震台,FIB系统※主动隔№振台,半导体设备主动减震台,干涉仪主∴动隔振台,轮廓仪主动减☆震台,EBL电子束曝光机主动▅隔振台

                名称:ArisMD主动减震台/主动ξ隔振台
                可在线通过咨询了解详情
                 
                通过以下按钮进入下一步
                • 详情
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                ArisMD主动减震台/主动隔振台

                电子显微镜主动减震台,FIB系统主动隔振台,半导体设备主动减震台,干涉仪「主动隔振台,轮廓仪主动减※震台,EBL电子束曝光机主动隔振台。


                Description

                Compact modular active vibration isolation systems counteract vibrations affecting high-precision equipment and tools.Stationedon multiple independent isolators ArisMD has the capacity to support load of massive machines up to 4000kg. Low Profile isolators provides simple installation which does not require microscope lifting and recalibration.


                ArisMD主动隔振台.png



                Products Spec

                1. Patented Architecture

                2. Highly Damped Step Respond

                3. Power and Communication Box for centralized control

                4. Application-specific designs/products/ capabilities to meet your needs

                5. Ability to support massive machines, tools,systems

                 

                DeviceArisMD300ArisMD500ArisMD1000
                Dimensions (WxDxH) mm230X270X75230X270X75230X370X75
                Load Capacity (kg)100~300200~500500~1000


                Active Isolation Range0.5 – 100 Hz
                Degrees of FreedomAll 6 degree for System

                Vibration Isolation 

                Performance

                ~8db gain on 1Hz

                ~20db gain on 2Hz

                Settling time≤0.1 sec
                Actuator ForceVertical: 80 N; Horizontal 40 N

                Real-TimeDiagnostic 

                Tools

                Built-in Real-Time 2xChannels Oscilloscope, Real Time 2xChannel Spectrum Analyzer per Module and per 

                System

                Real-Time performance 

                adjustment

                Adaptive Control in ALL degrees of freedom in real-time. Remote Access
                Input VoltageAC 80-260V/50-60Hz
                Transmission ChartTransmission Chart.png



                Industry fields and Applications

                Vibration levels should meet the specs of sensitive tools and instruments. Mostly the Fabs, Laboratories and Cleanrooms floors often fail to meet the target devicespec.


                Using K&S Devices for new Fabs, Laboratories and Clean rooms reducing overall cost, meet specs, providing ultimate vibration and adaptive vibration isolation for sensitive tools and instruments could be adjusted to changed environmental conditions.


                1.  Big heavy floor microscopes – SEM,TEM

                2.  Semiconductor equipment

                3.  X-Ray, CT,MRI 


                FEI 透射电镜ARISMD主动隔震台︾安装案例.jpg TEM透射电子显微镜主动隔振台.jpgJEOL透射电镜ARISMD主动隔震器安装案ω 例JEOL透射电镜ARISMD主动隔震器安装案例.jpg
                Tescan扫描电镜ARISMD主动隔震台安装案例.png日立扫描电镜ARISMD主动隔震系统○安装案例.jpgZeiss电镜ARISMD主动隔震台安装案例.png
                晶圆检测系统ARISMD主动隔震台安装案例.png半导体▆设备主动隔震系统安装案例.pngOEM集成方案.jpg



                Installation comparisopn of ARisMDxxx systems versus another approaches


                Competitive approach for installation vibration isolation systems

                美国X品牌主动隔振台.png

                美国X品牌主动减震△台.png

                日本X品牌主动防【震台.png


                KNS Approach

                KNS主动隔振台.pngKNS主动减震台.jpgKNS主动防震台.jpg


                Key Benefits

                1. No need to lift precisiontool/instrument-K&S solution is very low profile,which easily integrating under the tool frame.

                2. No need to reconfigure the tool after isolation - save additional configuration cost and time.
                3. No need for heavy mechanical equipment and construction adaptations.
                4. Shortest installation time - only few single hours for installation.
                5. Very low installation cost.
                6. Improves tools/instruments performance and quality.
                7. Easy Integrates into tool/instrument workstation environment.


                关联产品:ARISTT桌上型主动隔震台(详情可点击图片了解,或致电至ζ一科技咨询)

                莱卡干涉仪主动隔震台.jpg原子々力显微镜主动隔振台.pngAFM主动减震台.png半导体设备主动防震台.png
                半导体检测设备主动隔震台.png显微镜主动减震台.jpg倒置显微镜主动隔振台.png光学系统ㄨ主动防震台.jpg